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PDF GM-1000 Data sheet ( Hoja de datos )
| Número de pieza | GM-1000 | |
| Descripción | Glass Master | |
| Fabricantes | Midas | |
| Logotipo |  |
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Product Specification
GM-1000
“Precision, high-speed inspection of glass masters supports our
yield management initiative and greatly improves customer satisfaction."
Glass Master Inspection
Glass masters are critical components used in the manu-
facture of increasingly complex electronic and semicon-
ductor devices. The cost of low yields and defects in
glass/quartz/film glassmasks can be very high -- not only
in terms of dollars
but also in reputa-
tion. To avoid the
possibility of ship-
ping defective glass
or artwork masters,
manufacturers are
now relying upon
automated optical
inspection systems
to increase their pro-
ductivity and
improve outgoing
quality.
GM-1000
MIDAS' GM-1000
The GM-1000 AOI process module inspects glass masters
with resolution down to 3.8 micron. This provides glass
master manufacturers with the immediate feedback neces-
sary to refine their fabrication process and eliminate
defect-causing phenomenon.
The GM-1000 performs fast, accurate and repeatable glass
master inspection. The system provides highly efficient
Pass/Fail decisions while logging valuable information for
process and quality control. Yield-limiting defects such as
particulate, etching discrepancies, and debris are readily
exposed, logged, and optionally presented to an operator
for review.
Robust Operation
Sophisticated defect detection algorithms in the operating
software automatically detect and adapt to non-critical
pattern irregularities, thereby reducing false rejects.
Turn-Key Ready
The GM-1000 comes ready for integration into any manu-
facturing facility as a stand-alone process inspection module.
Highlights
Automatic defect detection ... detects yield-limiting excess-
es, voids and debris on glass masters
High throughput ... less
than 2 minutes for a 234
sq. cm glass master @ 3.8
micron
Flexible ... inspection of
glass masters up to 305
mm x 406 mm
Versatile fixturing ...
universal adaptor with
micro-alignment tools
Glass Master Calibration Standard
High precision ... defect
detection down to 7.6
micron, line and space widths down to 30 micron
Robust ... feature-based variable tolerancing, adaptive defect
analysis, and dual thresholding for low false rejects
(see detailed product specifications on backside)
Yield Management in Glass Master Manufacturing
100%
90%
80%
70%
60%
Human
GM-1000
20%
15%
10%
5%
0%
Human
GM-1000
Preliminary Data
1 page | ||
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