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PDF MPX5010 Data sheet ( Hoja de datos )
| Número de pieza | MPX5010 | |
| Descripción | INTEGRATED PRESSURE SENSOR | |
| Fabricantes | Motorola Semiconductors | |
| Logotipo |  |
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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPX5010/D
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
The MPX5010 series piezoresistive transducer is a state–of–the–art monolithic silicon
pressure sensor designed for a wide range of applications, but particularly those
employing a microcontroller or microprocessor with A/D inputs. This patented, single
element transducer combines advanced micromachining techniques, thin–film metalliza-
tion, and bipolar processing to provide an accurate, high level analog output signal that
is proportional to the applied pressure.
Features
• 5.0% Maximum Error over 0° to 85°C
• Ideally Suited for Microprocessor or Microcontroller–Based Systems
• Patented Silicon Shear Stress Strain Gauge
• Durable Epoxy Unibody Element
*• Temperature Compensated over 40° to +125°C
VS
3
MPX5010
SERIES
INTEGRATED
PRESSURE SENSOR
0 to 10 kPa (0 to 1.45 psi)
0.2 to 4.7 V OUTPUT
BASIC CHIP
CARRIER ELEMENT
CASE 867–08, STYLE 1
X–ducer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
1
Vout
2 PINS 4, 5 AND 6 ARE NO CONNECTS
GND
Figure 1. Fully Integrated Pressure Sensor Schematic
MAXIMUM RATINGS(1)
Parametrics
Symbol
Value
Unit
Overpressure(2) (P1 > P2)
Burst Pressure(2) (P1 > P2)
Pmax
Pburst
75 kPa
100 kPa
Storage Temperature
Tstg
– 40 to +125
°C
Operating Temperature
TA
– 40 to +125
°C
1. TC = 25°C unless otherwise noted.
2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
DIFFERENTIAL
PORT OPTION
CASE 867C–05, STYLE 1
PIN NUMBER
1 Vout 4 N/C
2 Gnd 5 N/C
3 VS 6 N/C
NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the Lead.
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 2
© MMotootroolrao, lIanc.S1e9n97sor Device Data
1
1 page  
MPX5010 SERIES
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing fluoro silicone gel
which protects the die from harsh media. The Motorola MPX
pressure sensor is designed to operate with positive differen-
tial pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the table
below:
Part Number
MPX5010D
MPX5010DP
MPX5010GP
MPX5010GVP
MPX5010GS
MPX5010GVS
MPX5010GSX
MPX5010GVSX
Case Type
867–08C
867C–05
867B–04
867D–04
867E–03
867A–04
867F–03
867G–03
Pressure (P1)
Side Identifier
Stainless Steel Cap
Side with Part Marking
Side with Port Attached
Stainless Steel Cap
Side with Port Attached
Stainless Steel Cap
Side with Port Attached
Stainless Steel Cap
ORDERING INFORMATION
The MPX5010 pressure sensor is available in differential and gauge configurations. Devices are available in the basic ele-
ment package or with pressure port fittings that provide printed circuit board mounting ease and barbed hose pressure connec-
tions.
MPX Series
Device Type
Options
Case Type
Order Number
Device Marking
Basic Element
Differential
867–08
MPX5010D
MPX5010D
Ported Elements
Differential Dual Ports
867C–05
MPX5010DP
MPX5010DP
Gauge
867B–04
MPX5010GP
MPX5010GP
Gauge Vacuum Port
867D–04
MPX5010GVP
MPX5010GVP
Gauge, Axial
867E–03
MPX5010GS
MPX5010D
Gauge Vacuum Axial
867A–04
MPX5010GVS
MPX5010D
Gauge, Axial PC Mount
867F–03
MPX5010GSX
MPX5010D
Gauge Vacuum Axial PC Mount
867G–03
MPX5010GVSX
MPX5010D
Motorola Sensor Device Data
5
5 Page | ||
| Páginas | Total 10 Páginas | |
| PDF Descargar | [ Datasheet MPX5010.PDF ] | |
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